Acton紫外陷波反射滤光片
多层反射滤光片是一种全介质反射器，在特定紫外-紫外波长下具有高反射率，同时还能透过较长波长的紫外-红外光。滤光片专为 45 度 AOI 而设计。 可定制峰值波长大于 250 nm 的紫外滤光片，其 DUV-VUV 透射率低于 ~210 nm。 注：涂层可应用于 Acton 标准基底、定制基底和客户提供的材料 (CSM)。
Acton紫外陷波反射滤光片
VUV/UV Notch – Reflective Filters
VUV/UV Reflective Filters – 45° AOI on Acton Standard Filter Substrates
| Wavelength(nm) | Peak Reflectance | 1.0”Diameter 2mm thick | 1.5”Diameter 2mm thick | 2.0”Diameter 2mm thick |
|---|---|---|---|---|
| 126nm | ≥ 40% | M126-3045-1D | M126-3045-1.5D | M126-3045-2D |
| 146nm | ≥ 45% | M146-3045-1D | M146-3045-1.5D | M146-3045-2D |
| 157nm | ≥ 82% | M157-3045-1D | M157-3045-1.5D | M157-3045-2D |
| 172nm | ≥ 82% | M172-3045-1D | M172-3045-1.5D | M172-3045-2D |
| 185nm | ≥ 82% | M185-3045-1D | M185-3045-1.5D | M185-3045-2D |
| 193nm | ≥ 82% | M193-3045-1D | M193-3045-1.5D | M193-3045-2D |
| 200nm | ≥ 90% | M200-3045-1D | M200-3045-1.5D | M200-3045-2D |
| 208nm | ≥ 90% | M208-3045-1D | M208-3045-1.5D | M208-3045-2D |
| 212nm | ≥ 90% | M212-3045-1D | M212-3045-1.5D | M212-3045-2D |
| 220nm | ≥ 90% | M220-3045-1D | M220-3045-1.5D | M220-3045-2D |
| 240nm | ≥ 90% | M240-3045-1D | M240-3045-1.5D | M240-3045-2D |
| 248nm | ≥ 90% | M248-3045-1D | M248-3045-1.5D | M248-3045-2D |
| 254nm | ≥ 90% | M254-3045-1D | M254-3045-1.5D | M254-3045-2D |
| 260nm | ≥ 90% | M260-3045-1D | M260-3045-1.5D | M260-3045-2D |
| 266nm | ≥ 90% | M266-3045-1D | M266-3045-1.5D | M266-3045-2D |
| 280nm | ≥ 90% | M280-3045-1D | M280-3045-1.5D | M280-3045-2D |
| 300nm | ≥ 90% | M300-3045-1D | M300-3045-1.5D | M300-3045-2D |
| 320nm | ≥ 90% | M320-3045-1D | M320-3045-1.5D | M320-3045-2D |
| 340nm | ≥ 90% | M340-3045-1D | M340-3045-1.5D | M340-3045-2D |
| 352nm | ≥ 90% | M352-3045-1D | M352-3045-1.5D | M352-3045-2D |
| 360nm | ≥ 90% | M360-3045-1D | M360-3045-1.5D | M360-3045-2D |
典型曲线
滤光片尺寸
NOTE: Filters are supplied open-faced unless otherwise specified
* 2.0“ Diameter 122-157nm filters are 5mm thick
| Unmounted Filter Diameter |
Diameter Tolerance |
Mounted Filter Diameter ±0.005” |
Unmounted Filter Thickness |
Mounted Thickness | Clear Aperture |
|---|---|---|---|---|---|
| 0.5” (12.7mm) | +0.00”/-0.005” (0.127mm) | 0.625” (15.88mm) | 0.079″ (2mm) | 0.300” (7.62mm) | 0.450” (11.43mm) |
| 1.0” (25.4mm) | +0.00”/-0.005” (0.127mm) | 1.200” (30.48mm) | 0.098″ (2.5mm) | 0.375” (9.53mm) | 0.800” (20.32mm) |
| 2.0” (50.8mm) | +0.00”/-0.005” (0.127mm) | 2.225” (56.52mm) | 0.197″ (4mm) | 0.500” (12.7mm) | 1.900” (48.26mm) |
滤光片材料
| Wavelengths | < 140nm | 140-169nm | 170-320nm |
|---|---|---|---|
| Substrate Material | VUV MgF2 | VUV CaF2 | UV Grade Fused Silica |