Acton紫外—— VUV/UV限波滤光片

基本信息

Acton紫外—— VUV/UV限波滤光片

多层反射滤光片是全介质反射镜,在特定的VUV通过UV波长提供高反射率,同时发射较长波长的紫外到红外光。滤波器是为45度AOI设计的。

定制的峰值波长>250 nm的紫外滤光片可与DUV-VUV透过率低于~210 nm。

VUV/UV反射滤光片- Acton标准滤光片为45°AOI。

Wavelength Peak Reflectance 1.0” Part Numbers 1.5” Part Numbers 2.0” Part Numbers
126nm ≥ 40% M126-3045-1D M126-3045-1.5D M126-3045-2D
146nm ≥ 45% M146-3045-1D M146-3045-1.5D M146-3045-2D
157nm ≥ 82% M157-3045-1D M157-3045-1.5D M157-3045-2D
172nm ≥ 82% M172-3045-1D M172-3045-1.5D M172-3045-2D
185nm ≥ 82% M185-3045-1D M185-3045-1.5D M185-3045-2D
193nm ≥ 82% M193-3045-1D M193-3045-1.5D M193-3045-2D
200nm ≥ 90% M200-3045-1D M200-3045-1.5D M200-3045-2D
208nm ≥ 90% M208-3045-1D M208-3045-1.5D M208-3045-2D
212nm ≥ 90% M212-3045-1D M212-3045-1.5D M212-3045-2D
220nm ≥ 90% M220-3045-1D M220-3045-1.5D M220-3045-2D
240nm ≥ 90% M240-3045-1D M240-3045-1.5D M240-3045-2D
248nm ≥ 90% M248-3045-1D M248-3045-1.5D M248-3045-2D
254nm ≥ 90% M254-3045-1D M254-3045-1.5D M254-3045-2D
260nm ≥ 90% M260-3045-1D M260-3045-1.5D M260-3045-2D
266nm ≥ 90% M266-3045-1D M266-3045-1.5D M266-3045-2D
280nm ≥ 90% M280-3045-1D M280-3045-1.5D M280-3045-2D
300nm ≥ 90% M300-3045-1D M300-3045-1.5D M300-3045-2D
320nm ≥ 90% M320-3045-1D M320-3045-1.5D M320-3045-2D
340nm ≥ 90% M340-3045-1D M340-3045-1.5D M340-3045-2D
352nm ≥ 90% M352-3045-1D M352-3045-1.5D M352-3045-2D
360nm ≥ 90% M360-3045-1D M360-3045-1.5D M360-3045-2D

注意: 在175nm以下的过滤器衬底材料是CaF2和在175nm以上的熔融石英Fused Silica

光谱曲线

注意:典型样品的涂层性能曲线显示。具体设计曲线,包括反射率和透过率可根据要求设计。